DESIGN AND ANALYSIS OF MEMS INDUCTORS AND FILTERS FOR 1GHz APPLICATION
Keywords:
RF Filter, Self Resonance Frequency (SRF), Planar Inductor, Spiral Inductor, Meander Inductor, MEMS Filter.Abstract
This paper investigates the use of spiral and meander inductors designed using MEMS (MicroElectro-Mechanical-System) technology in passive filter circuit. To obtain better Quality factor the width, spacing, number of turns and thickness of the inductor coil are appropriately selected after studying their interdependencies and ease in fabrication. The substrate losses of the inductor were reduced as it is suspended above the substrate thereby improving the Quality factor of the inductors. HFSS Design tool is used to design and measure the substrate losses of the inductors and plot its scattering performance parameters. Two planar meander inductors connected in series was fabricated using surface and bulk micromachining techniques and optical lithography. Lastly 3 pole passive filters designs in MEMS using spiral inductor and meander inductor designs and interdigited capacitor is proposed for applications in transreceiver system having a cut off frequency of 1GHz.
