Design Optimization and fabrication issues of MEMS resonator
Prasanna P. Deshpande
RCOEM, Nagpur , IN
Pranali M. Talekar
RCOEM, Nagpur , IN
Deepak G. Khushalani
RCOEM, Nagpur , IN
Rajesh S. Pande
RCOEM, Nagpur , IN
Keywords: ANOVA, fabrication, LFE CM resonator, MEMS, RF, Taguchi
Abstract
A 1.2 GHz design optimization of microfabricated lateral field excited contour mode resonator based on MEMS(microelectromechanical system) technology for RF (radio frequency) application is presented in this paper. The emphasis is on investigating a paradigm that relieves the overly large motional resistance of the electrostatically transduced microresonators. The piezoelectric transduction provides significant advantages over capacitive transduction in terms of lower impedance, higher power handling capability and easier fabrication. The piezoelectrically transduced MEMS resonator directly replaces the off-chip filter and oscillator in the state-of-practice
RF communication system and may potentially enable new wireless front-end architecture. The piezoelectric material zinc oxide is used for the better performance of the device. The geometrical parameters of the resonator determine the resonant frequency, the quality factor and the motional resistance hence the parameters need to be properly optimized. The parameter optimization ensures the best performance of the device. The optimization has been done by Taguchi method of design of experimentations followed by ANOVA (analysis of variance). The optimized dimensions have been used for simulation by COMSOLTM Multiphysics. Finally, some issues are discussed while fabricating the device
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