STATIC ANALYSIS OF ELECTROSTATICALLY ACTUATED MEMS BASED MICROCANTILVER BEAM USING THE NON-LINEAR DISTRIBUTED PARAMETER MODEL

R. Umar
Department of Mechanical Engineering National Institute of Technology Srinagar J&K 190006 India , IN

Keywords: MEMS, Pull-in voltage; Weighted Galerkin method; Reduced order model.

Abstract

Static Analysis of a MEMS (Micro electro mechanical systems) based micro-cantilever beam using the distributed parameter modeling. The pull-in voltage of the micro-cantilever beam is obtained and the same is compared with results obtained by M.Younis and the analytic method The pull-in voltage thus obtained provided an accurate resemblance with the other approaches The simulation results were obtained by solving the equations in the MATLAB. The method of Weighted Galerkin’s approach was used to solve the differential equation and both linear and non-linear results were obtained. The method predicted the pull in voltage higher than predicted by the reduced order model. The result obtained for the displacement at pull-in was also compared with the reduced order model
and analytical method and result thus obtained turned out be in the middle of the those predicted by the reduced order model and the analytic method.

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